EXCEED2300
Ion species：B⁺, BF₂⁺, P⁺, As⁺, In⁺, Sb⁺, and more
Dose range：5E10–1E17
Energy：5keV–600keV
IMPHEAT-II
Ion species：Al+, P+, As+, B+, N+, and more
Dose range：5E10–1E17
Energy：5keV–960keV
RT–500°C substrate heating
EXCEED400HY
Ion species：Al+, P+, As+, B+, N+ , and more
Dose range：5E10 ～ 1E17
Energy：5keV ～ 960keV
BeyEX
Ion species：B+, BF2+, P+, As+, In+, Sb+ , and more
Dose range：5E10 ～ 1E17
Energy：5keV ～ 750keV
CLARIS
Ion species：B18Hx+, B10Hx+, C16Hx+, C14Hx+, C7Hx+, P4+, As4+ , and more
Dose range：5E10 ～ 1E17
(Acceleration) energy：4keV ～ 80keV
*Contact us to inquire about monomer conversion energy.
Ion Implantation Services — List of Equipment EQUIPMENT LIST
- Parallel-beam ion implanters
- Manufacturer: Nissin Ion Equipment Co., Ltd.
| Model | Wafer size | Remarks |
| EXCEED2300 | 12” | Available for 300 mm FOUPs |
| IMPHEAT-II | 6” | Available for high temperatures |
| EXCEED400HY | 8” | – |
| BeyEx | 12” | Available for 300 mm FOUPs |
| CLARIS | 12” | Available for 300 mm FOUPs |
- Clean Rooms
- Manufacturer: Takasago Thermal Engineering Co., Ltd.
| Model | Wafer size | Remarks |
| CLASS 1 | – | – |
- Annealing Furnaces
- Manufacturer: JTEKT Thermo Systems Corporation
| Model | Wafer size | Remarks |
| VF2000S | 8″,6″,5″,4″,3″ | Available for small-diameter wafers |
| VF-1000 | 12″,8″,6″ | – |
- RTP
- Manufacturer: Mattson Thermal Products GmbH
| Model | Wafer size | Remarks |
| AST3000 | 12″,8″ | – |
- Dose Monitors
- Manufacturer: Therma-Wave Inc.
| Model | Wafer size | Remarks |
| TP-630 | 12″,8″,6″ | – |
- Laser-Based Surface Inspection Equipment
- Manufacturer: KLA Corporation
| Model | Wafer size | Remarks |
| SP1 TBI | 12″,8″ | – |
| SP1 CLASSIC | 12″,8″ | – |
- Sheet Resistance Testers
- Manufacturer: KLA Corporation
| Model | Wafer size | Remarks |
| RS-35C | 8″,6″,5″,4″,3″ | – |
| RS-100 | 12″,8″ | – |
- Wafer Transfer Machines
- Manufacturer: JEL
| Model | Wafer size | Remarks |
| – | 12″,8″ | Available for 300 mm FOUPs |
