Material Modification Equipment
KYOKA
The World’s First Semiconductor Material Modification Machine
Features
High-productivity material modification equipment
- Ultra-high current ion beams accomplished with Nissin’s novel sheet beam technology
- High current beams even below 1 keV enabled by the optimized beam transport design
- Variety of ion species available by Nissin’s cutting-edge source technology
Reliable technology with market recognition
- The same technologies are employed as in our equipment, iG6, which monopolizes the flat panel display industry over a decade.
