Ion implanters for semiconductor manufacturing
EXCEED400HY
The world’s only hydrogen implanter for lasers devices and power devices
Merit
The world’s only hydrogen implanter for lasers devices and power devices
- High-current H⁺ and H₂⁺ beams provide high productivity.
- Capable of H⁺ 400keV implantation
Remarkably high cost performance compared to previous high-energy implanters due to high-current of up to 400keV - Sufficient field experience in VCSEL production
- Thin wafer processing is possible due to a transport system that can handle thin silicon wafers.
- Also used for rear surface H⁺ implantation for power device lifetime control.
- Available wafer size: 4/6/8 inches
Developed using the best-selling medium-current EXCEED series as its base.
- High reliability
- Common maintenance parts
