List of equipmentEQUIPMENT LIST

EXCEED2300

Ion species：B⁺, BF₂⁺, P⁺, As⁺, In⁺, Sb⁺, and more
Dose range：5E10–1E17
Energy：5keV–600keV

IMPHEAT-II

Ion species：Al⁺, P⁺, As⁺, B⁺, N⁺, and more
Dose range：5E10–1E17
Energy：5keV–960keV
RT–500°C substrate heating

EXCEED400HY

Ion species：Al⁺, P⁺, As⁺, B⁺, N⁺ , and more
Dose range：5E10 ～ 1E17
Energy：5keV ～ 960keV

BeyEX

Ion species：B⁺, BF2⁺, P⁺, As⁺, In⁺, Sb⁺ , and more
Dose range：5E10 ～ 1E17
Energy：5keV ～ 750keV

CLARIS

Ion species：B18Hx⁺, B10Hx⁺, C16Hx⁺, C14Hx⁺, C7Hx⁺, P4⁺, As4⁺ , and more
Dose range：5E10 ～ 1E17
(Acceleration) energy：4keV ～ 80keV
*Contact us to inquire about monomer conversion energy.

IBE (Ion Beam Etching) / Ion Milling

Ion species: Ar⁺
Energy: 50 – 800 eV
High-precision, damage-free material removal