Points of Contact Between People and Lifestyles: LSI (Semiconductors)
Semiconductors are an indispensable part of daily life, being found in everything from home appliances to infrastructure, and they expanding into an even wider range of fields, including EVs and carbon-neutral industry.
Our ion implanters for semiconductor manufacturing range from highly versatile medium-current equipment to equipment for power devices, which are expected to become more widespread due to interest in energy conservation and SDGs.
Advances in productivity, technology, and performance are demanded on a daily basis, and we will continue to develop equipment that produce cutting-edge devices and satisfy our customers’ requirements.
Diverse Applications
Our ion implanters for semiconductor manufacturing are used by customers worldwide as indispensable equipment for manufacturing a diverse variety of semiconductor products, including computer CPUs, DRAM, flash memory, and system LSI, as well as microcontrollers and inverters used in electrical appliances, semiconductors for use in automobiles, and imaging sensors used in digital cameras.
Our ion implanters for semiconductor manufacturing are used by customers worldwide as indispensable equipment for manufacturing a diverse variety of semiconductor products, including computer CPUs, DRAM, flash memory, and system LSI, as well as microcontrollers and inverters used in electrical appliances, semiconductors for use in automobiles, and imaging sensors used in digital cameras.
High-Temperature Implantation
Our equipment development reflects the device-related needs that are the result of growing environmental awareness, and we have developed and marketed IMPHEAT, a high-temperature ion implanter for mass production that can handle the manufacturing of power devices—semiconductor devices for electrical power equipment that can handle high voltages and high currents more efficiently than conventional semiconductor devices, and which have attracted attention for use in EVs, HEVs, and home appliances for the purpose of saving energy.
Available for various Ion Species
As the diversity of semiconductor products grows, a wider variety of implanted ion species are being used for production than in the past. For example, implantation of aluminum (Al) and hydrogen (H) is now used in the manufacture of power devices, which have been the focus of much attention in recent years, and we provide ion implanters that are suited to device-related needs worldwide.
As the diversity of semiconductor products grows, a wider variety of implanted ion species are being used for production than in the past. For example, implantation of aluminum (Al) and hydrogen (H) is now used in the manufacture of power devices, which have been the focus of much attention in recent years, and we provide ion implanters that are suited to device-related needs worldwide.
Product Lineup LINEUP
EXCEED Series
Medium-current ion implanter with a proven track record for high productivity and process reliability that can handle nano technology nodes. Includes a highly reliable transfer system for a wide variety of substrates.
