The International Conference on Ion Implantation Technology 2022 was
held in San Diego,USA from 25th to 29th September.
The 23rd International Conference on Ion Implantation Technology 2022
(IIT2022) was held from Sept 25th to 29th 2022 in San Diego, the United
States.
The latest topics regarding device/process technologies, equipment, novel applications of ion implantation and annealing were reportedly discussed.
Nissin Ion presented 6 papers,
・Development of Ultra-High-Current Implanter for Material Modification Process in Next Era Devices
・The Detail Analysis of Behavior of Heavy Metals In 4H-SiC
・Beam Shape Control System by Machine-Learning on the NISSIN BeyEX Medium Current Ion Implanter
・IMPHEAT-II, A Novel High Temperature Ion Implanter for SiC Power Devices
・A Newly Developed ECR Ion Source with Wide Dynamic Range of Beam Current
・New Control System of the Multiple Filaments in the Large Ion Source for Ion Doping System iG6 Ver.2
which drew considerable attention. Should you be interested in our presentations, please do not hesitate to contact us.
