{"id":376,"date":"2022-06-10T17:30:08","date_gmt":"2022-06-10T08:30:08","guid":{"rendered":"https:\/\/www.nissin-ion.co.jp\/en\/?page_id=376"},"modified":"2026-06-03T12:07:07","modified_gmt":"2026-06-03T03:07:07","slug":"equipment","status":"publish","type":"page","link":"https:\/\/www.nissin-ion.co.jp\/en\/prd\/ios\/equipment\/","title":{"rendered":"List of equipment"},"content":{"rendered":"\n
\n
\n \"EXCEED2300\"\n
\n

EXCEED2300<\/p>\n

Ion species\uff1aB\u207a, BF\u2082\u207a, P\u207a, As\u207a, In\u207a, Sb\u207a, and more
\nDose range\uff1a5E10\u20131E17
\nEnergy\uff1a5keV\u2013600keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"IMPHEAT-II\"\n
\n

IMPHEAT-II<\/p>\n

Ion species\uff1aAl\u207a, P\u207a, As\u207a, B\u207a, N\u207a, and more
\nDose range\uff1a5E10\u20131E17
\nEnergy\uff1a5keV\u2013960keV
\nRT\u2013500\u00b0C substrate heating<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"EXCEED400HY\"\n
\n

EXCEED400HY<\/p>\n

Ion species\uff1aAl\u207a, P\u207a, As\u207a, B\u207a, N\u207a , and more
\nDose range\uff1a5E10 \uff5e 1E17
\nEnergy\uff1a5keV \uff5e 960keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"BeyEX\"\n
\n

BeyEX<\/p>\n

Ion species\uff1aB\u207a, BF2\u207a, P\u207a, As\u207a, In\u207a, Sb\u207a , and more
\nDose range\uff1a5E10 \uff5e 1E17
\nEnergy\uff1a5keV \uff5e 750keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"CLARIS\"\n
\n

CLARIS<\/p>\n

Ion species\uff1aB18Hx\u207a, B10Hx\u207a, C16Hx\u207a, C14Hx\u207a, C7Hx\u207a, P4\u207a, As4\u207a , and more
\nDose range\uff1a5E10 \uff5e 1E17
\n(Acceleration) energy\uff1a4keV \uff5e 80keV
\n*Contact us to inquire about monomer conversion energy.<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"IBE\n
\n

IBE (Ion Beam Etching) \/ Ion Milling<\/p>\n

Ion species: Ar\u207a
\nEnergy: 50 \u2013 800 eV
\nHigh-precision, damage-free material removal<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n<\/div><\/div>\n\n\n

\n
\n

\n Ion Implantation Services \u2014 List of Equipment<\/span>\n EQUIPMENT LIST<\/span>\n <\/h2>\n <\/div>\n<\/div>\n\n\n
\n
\n
\n
Parallel-beam ion implanters<\/dt>\n
Manufacturer: Nissin Ion Equipment Co., Ltd.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
EXCEED2300<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr>
IMPHEAT-II<\/td>6\u201d<\/td>Available for high temperatures<\/td><\/tr>
EXCEED400HY<\/td>8\u201d<\/td> –<\/td><\/tr>
BeyEx<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr>
CLARIS<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
IBE (Ion Beam Etching) \/ Ion Milling<\/dt>\n
Manufacturer: Nissin Ion Equipment Co., LTD.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Type<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
IBE<\/td>12\u201d, small samples supported as well<\/td>Available for 300 mm FOUPs<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Clean Rooms<\/dt>\n
Manufacturer: Takasago Thermal Engineering Co., Ltd.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
CLASS 1<\/td>–<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Annealing Furnaces<\/dt>\n
Manufacturer: JTEKT Thermo Systems Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
VF2000S<\/td>8″,6″,5″,4″,3″<\/td>Available for small-diameter wafers<\/td><\/tr>
VF-1000<\/td>12″,8″,6″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
RTP<\/dt>\n
Manufacturer: Mattson Thermal Products GmbH<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
AST3000<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Dose Monitors<\/dt>\n
Manufacturer: Therma-Wave Inc.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
TP-630<\/td>12″,8″,6″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Laser-Based Surface Inspection Equipment<\/dt>\n
Manufacturer: KLA Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
SP1 TBI<\/td>12″,8″<\/td>–<\/td><\/tr>
SP1 CLASSIC<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Sheet Resistance Testers<\/dt>\n
Manufacturer: KLA Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
RS-35C<\/td>8″,6″,5″,4″,3″<\/td>–<\/td><\/tr>
RS-100<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Wafer Transfer Machines<\/dt>\n
Manufacturer: JEL<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
–<\/td>12″,8″<\/td>Available for 300 mm FOUPs<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"

Model Wafer size Remarks EXCEED2300 12\u201d Available for 300 mm FOUPs IMPHEAT-II 6\u201d Available for high temperatures EXCEED400HY 8\u201d – BeyEx 12\u201d Available for 300 mm FOUPs CLARIS 12\u201d Available for 300 mm FOUPs Type Wafer size Remarks IBE 12\u201d, small samples supported as well Available for 300 mm FOUPs Model Wafer size Remarks CLASS 1 – – Model Wafer size Remarks VF2000S 8″,6″,5″,4″,3″ Available for small-diameter wafers VF-1000 12″,8″,6″ – Model Wafer size Remarks AST3000 12″,8″ – Model Wafer size Remarks TP-630 12″,8″,6″ – Model Wafer size Remarks SP1 TBI 12″,8″ – SP1 CLASSIC 12″,8″ – Model Wafer size Remarks RS-35C 8″,6″,5″,4″,3″ – RS-100 12″,8″ – Model Wafer size […]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":355,"menu_order":21,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-376","page","type-page","status-publish","hentry"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376"}],"collection":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/comments?post=376"}],"version-history":[{"count":26,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376\/revisions"}],"predecessor-version":[{"id":1683,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376\/revisions\/1683"}],"up":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/355"}],"wp:attachment":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/media?parent=376"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}