{"id":376,"date":"2022-06-10T17:30:08","date_gmt":"2022-06-10T08:30:08","guid":{"rendered":"https:\/\/www.nissin-ion.co.jp\/en\/?page_id=376"},"modified":"2022-09-26T12:03:33","modified_gmt":"2022-09-26T03:03:33","slug":"equipment","status":"publish","type":"page","link":"https:\/\/www.nissin-ion.co.jp\/en\/prd\/ios\/equipment\/","title":{"rendered":"List of equipment"},"content":{"rendered":"\n
\n
\n \"EXCEED2300\"\n
\n

EXCEED2300<\/p>\n

Ion species\uff1aB\u207a, BF\u2082\u207a, P\u207a, As\u207a, In\u207a, Sb\u207a, and more
\nDose range\uff1a5E10\u20131E17
\nEnergy\uff1a5keV\u2013600keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"IMPHEAT-II\"\n
\n

IMPHEAT-II<\/p>\n

Ion species\uff1aAl+, P+, As+, B+, N+, and more
\nDose range\uff1a5E10\u20131E17
\nEnergy\uff1a5keV\u2013960keV
\nRT\u2013500\u00b0C substrate heating<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"EXCEED400HY\"\n
\n

EXCEED400HY<\/p>\n

Ion species\uff1aAl+, P+, As+, B+, N+ , and more
\nDose range\uff1a5E10 \uff5e 1E17
\nEnergy\uff1a5keV \uff5e 960keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"BeyEX\"\n
\n

BeyEX<\/p>\n

Ion species\uff1aB+, BF2+, P+, As+, In+, Sb+ , and more
\nDose range\uff1a5E10 \uff5e 1E17
\nEnergy\uff1a5keV \uff5e 750keV<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n\n\n

\n
\n \"CLARIS\"\n
\n

CLARIS<\/p>\n

Ion species\uff1aB18Hx+, B10Hx+, C16Hx+, C14Hx+, C7Hx+, P4+, As4+ , and more
\nDose range\uff1a5E10 \uff5e 1E17
\n(Acceleration) energy\uff1a4keV \uff5e 80keV
\n*Contact us to inquire about monomer conversion energy.<\/p>\n <\/div>\n \n <\/div>\n<\/div>\n<\/div><\/div>\n\n\n

\n
\n

\n Ion Implantation Services \u2014 List of Equipment<\/span>\n EQUIPMENT LIST<\/span>\n <\/h2>\n <\/div>\n<\/div>\n\n\n
\n
\n
\n
Parallel-beam ion implanters<\/dt>\n
Manufacturer: Nissin Ion Equipment Co., Ltd.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
EXCEED2300<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr>
IMPHEAT-II<\/td>6\u201d<\/td>Available for high temperatures<\/td><\/tr>
EXCEED400HY<\/td>8\u201d<\/td> –<\/td><\/tr>
BeyEx<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr>
CLARIS<\/td>12\u201d<\/td>Available for 300 mm FOUPs<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Clean Rooms<\/dt>\n
Manufacturer: Takasago Thermal Engineering Co., Ltd.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
CLASS 1<\/td>–<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Annealing Furnaces<\/dt>\n
Manufacturer: JTEKT Thermo Systems Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
VF2000S<\/td>8″,6″,5″,4″,3″<\/td>Available for small-diameter wafers<\/td><\/tr>
VF-1000<\/td>12″,8″,6″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
RTP<\/dt>\n
Manufacturer: Mattson Thermal Products GmbH<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
AST3000<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Dose Monitors<\/dt>\n
Manufacturer: Therma-Wave Inc.<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
TP-630<\/td>12″,8″,6″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Laser-Based Surface Inspection Equipment<\/dt>\n
Manufacturer: KLA Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
SP1 TBI<\/td>12″,8″<\/td>–<\/td><\/tr>
SP1 CLASSIC<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Sheet Resistance Testers<\/dt>\n
Manufacturer: KLA Corporation<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
RS-35C<\/td>8″,6″,5″,4″,3″<\/td>–<\/td><\/tr>
RS-100<\/td>12″,8″<\/td>–<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n
\n
\n
\n
Wafer Transfer Machines<\/dt>\n
Manufacturer: JEL<\/dd>\n <\/dl>\n <\/div>\n<\/div>\n\n\n\n
Model<\/td>Wafer size<\/td>Remarks<\/td><\/tr>
–<\/td>12″,8″<\/td>Available for 300 mm FOUPs<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"

Model Wafer size Remarks EXCEED2300 12\u201d Available for 300 mm FOUPs IMPHEAT-II 6\u201d Available for high temperatures EXCEED400HY 8\u201d – BeyEx 12\u201d Available for 300 mm FOUPs CLARIS 12\u201d Available for 300 mm FOUPs Model Wafer size Remarks CLASS 1 – – Model Wafer size Remarks VF2000S 8″,6″,5″,4″,3″ Available for small-diameter wafers VF-1000 12″,8″,6″ – Model Wafer size Remarks AST3000 12″,8″ – Model Wafer size Remarks TP-630 12″,8″,6″ – Model Wafer size Remarks SP1 TBI 12″,8″ – SP1 CLASSIC 12″,8″ – Model Wafer size Remarks RS-35C 8″,6″,5″,4″,3″ – RS-100 12″,8″ – Model Wafer size Remarks – 12″,8″ Available for 300 mm FOUPs<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":355,"menu_order":21,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-376","page","type-page","status-publish","hentry"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376"}],"collection":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/comments?post=376"}],"version-history":[{"count":25,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376\/revisions"}],"predecessor-version":[{"id":1292,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/376\/revisions\/1292"}],"up":[{"embeddable":true,"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/pages\/355"}],"wp:attachment":[{"href":"https:\/\/www.nissin-ion.co.jp\/en\/wp-json\/wp\/v2\/media?parent=376"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}