Business & Products Information

Ion Implanter for Semiconductor Process

IMPHEAT®

Only mass production tool for high-temperature ion implant

IMPHEAT®

Features

Only mass production tool for high-temperature ion implant

  • Cover from room temperature to 500 degrees C.
  • Practical throughput
  • High current Al beam that contributes to productivity

Development based on field-proven EXCEED tool

  • High reliability
  • Common maintenance parts

Inquiries by e-mail

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