Business & Products Information

Ion Implanter for FPD(LTPS) Process

iG6、iG5

Provide the optimum machines for manufacturing low-temperature poly silicon display

iG6、iG5

Features

  • Mass separation
  • Contamination free
  • High precise
  • High repeatability
  • Wide range (from S/D to Vth)
  • Short beam setup time
  • Alternative scan cooling system
  • Ion beam charge neutralization system

Specification

Glass size

  • iG6:1,500mm×1,800mm
  • iG5:1,300mm×1,500mm

Gas

  • iG6:PH3/H2, BF3
  • iG5:PH3/H2, BF3

Beam energy

  • iG6:10~80keV
  • iG5:10~80keV

Dimension

  • iG6:8.4×13.0×3.9(m)
  • iG5:7.5×12.4×3.9(m)

Inquiries by e-mail

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